High-speed InAlAs digital alloy avalanche photodiode

Author:

Wang Wenyang123ORCID,Yao Jinshan4ORCID,Li Linze1ORCID,Ge Huachen1ORCID,Wang Luyu1ORCID,Zhu Liqi1ORCID,Chen Qiushi1ORCID,Lu Hong45ORCID,Chen Baile16ORCID

Affiliation:

1. School of Information Science and Technology, ShanghaiTech University 1 , Shanghai 201210, China

2. Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences 2 , Shanghai 200050, China

3. University of Chinese Academy of Sciences 3 , Beijing 100049, China

4. National Laboratory of Solid-State Microstructures & Department of Materials Science and Engineering, College of Engineering and Applied Sciences, Nanjing University 4 , Nanjing 210093, Jiangsu Province, China

5. Jiangsu Key Laboratory of Artificial Functional Materials, Nanjing University 5 , Nanjing 210093, Jiangsu Province, China

6. Shanghai Engineering Research Center of Energy Efficient and Custom AI IC 6 , Shanghai 201210, China

Abstract

Digital alloy (DA) InAlAs on the InP substrate exhibits a lower excess noise compared to a traditional In0.52Al0.48As random alloy as the multiplication layer in avalanche photodiodes (APDs). This work implements DA InAlAs as the multiplication layer in a 1550 nm separate absorption, grading, charge, and multiplication APD and characterizes the performances through various analyses. The device reaches a maximum gain of 221 before avalanche breakdown, with a maximum gain-bandwidth product of more than 140 GHz. At 90% breakdown voltage, the dark current density is 4.1 mA/cm2, and the responsivity is 0.48 A/W at unit gain. Excess noise factors were identified, yielding an effective k value of around 0.15, which is lower than that of random alloy In0.52Al0.48As APDs (k ∼0.2). These findings show that DA InAlAs has the potential to be a promising material for high-performance APDs.

Funder

National Key Research and Development Program of China

National Natural Science Foundation of China

Publisher

AIP Publishing

Subject

Physics and Astronomy (miscellaneous)

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