Characterization of haze‐forming precipitates in silicon
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.340164
Reference28 articles.
1. Transition metals in silicon
2. A Cause and Cure of Stacking Faults in Silicon Epitaxial Layers
3. Palladium-Test: A Tool to Evaluate Gettering Efficiency
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