Studies of boron diffusivity in strained Si1−xGex epitaxial layers
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1332803
Reference19 articles.
1. Diffusion of Sb in Strained and Relaxed Si and SiGe
2. Boron diffusion in strainedSi1−xGexepitaxial layers
3. Diffusion in strained Si(Ge)
4. Effects of strain on boron diffusion in Si and Si1−xGex
5. Pressure and Strain Effects on Diffusion
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