An optical emission study of the glow‐discharge deposition of hydrogenated amorphous silicon from argon‐silane mixtures
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.332382
Reference13 articles.
1. Effects of inert gas dilution of silane on plasma‐deposited a‐Si:H films
2. (Invited) Characterization of Plasma-Deposited Amorphous Si: H Thin Films
3. Luminescence studies of plasma-deposited hydrogenated silicon
4. Origin of emitting species in the plasma deposition of a‐Si:H alloys
5. Emission cross sections from fragments produced by electron impact on silane
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