In situ monitoring of silicon nanocrystal formation with pulsed SiH4supply by optical emission spectroscopy of Ar plasma
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Link
http://stacks.iop.org/1347-4065/53/i=11/a=116102/pdf
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1. Quantum confinement in Si nanocrystals
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2. Unravelling a simple method for the low temperature synthesis of silicon nanocrystals and monolithic nanocrystalline thin films;Scientific Reports;2017-01-16
3. Nonthermal Plasma Synthesis of Nanocrystals: Fundamental Principles, Materials, and Applications;Chemical Reviews;2016-08-23
4. Structural evolution of Ge-rich Si1−xGex films deposited by jet-ICPCVD;AIP Advances;2015-11
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