Vacuum-UV fluorescence spectroscopy of SiF4 in the range 10–30 eV-Reference-Cited by-同舟云学术

登录注册会员服务联系我们

Vacuum-UV fluorescence spectroscopy of SiF4 in the range 10–30 eV

Published:1997-07-15 Issue:3 Volume:107 Page:720-729
ISSN:0021-9606
Container-title:The Journal of Chemical Physics
language:en
Short-container-title:The Journal of Chemical Physics

Author:

Biehl H.,Boyle K. J.,Seccombe D. P.,Smith D. M.,Tuckett R. P.,Yoxall K. R.,Baumgärtel H.,Jochims H. W.

Publisher

AIP Publishing

Subject

Physical and Theoretical Chemistry,General Physics and Astronomy

Link

http://aip.scitation.org/doi/pdf/10.1063/1.474437

Reference34 articles.

1. Studies of chemiluminescence accompanying fluorine atom etching of silicon

2. SiF2as a primary desorption product of Si etching by F atoms: Interpretation of laser‐induced fluorescence spectra; rate constant of the gas phase SiF2+F reaction

3. Chemiluminescence from F and XeF2 etching reactions with silicon

4. Rotational analysis of absorption bands in the 2266 Å system of SiF2

5. The ultra-violet spectrum of silicon difluoride

Cited by 16 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. The MIGDAL experiment: Measuring a rare atomic process to aid the search for dark matter;Astroparticle Physics;2023-09

2. Real-time monitoring of atomic layer etching in Cl2/Ar pulsed gas, pulsed power plasmas by optical emission spectroscopy;Journal of Vacuum Science & Technology A;2023-04-27

3. Comparison endpoint study of process plasma and secondary electron beam exciter optical emission spectroscopy;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;2012-11

4. VUV Photodissociation of ammonia: a dispersed fluorescence excitation spectral study;Phys. Chem. Chem. Phys.;2005

5. Vibrational and Electronic Energy Levels of Polyatomic Transient Molecules. Supplement B;Journal of Physical and Chemical Reference Data;2003-03

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370

www.globalauthorid.com

TOP

Copyright © 2019-2024 北京同舟云网络信息技术有限公司
京公网安备11010802033243号京ICP备18003416号-3