A normal mode theory of capacitive radio frequency discharges between parallel electrodes under diffusion and recombination gas-discharge regimes
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Published:2000-02
Issue:2
Volume:7
Page:740-749
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ISSN:1070-664X
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Container-title:Physics of Plasmas
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language:en
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Short-container-title:Physics of Plasmas
Author:
Nonaka S.,Tsuge S.
Subject
Condensed Matter Physics