Secondary ion quadrupole mass spectrometer for depth profiling—design and performance evaluation
Author:
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1135438
Reference11 articles.
1. A low background secondary ion mass spectrometer with quadrupole analyser
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4. Analyses de couches minces de silice par emission ionique secondaire
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