Defects in hydrogenated microcrystalline silicon prepared by plasma-enhanced chemical vapour deposition
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.3095507
Reference34 articles.
1. Free electrons and defects in microcrystalline silicon studied by electron spin resonance
2. Electronic states in hydrogenated microcrystalline silicon
3. J. Müller, F. Finger, R. Carius, and H. Wagner, in Amorphous Silicon Technology, MRS Symposia Proceedings No. 507 (Materials Research Society, Pittsburgh, PA, 1998), p. 751.
4. Light induced phenomena in microcrystalline silicon
5. Electron spin resonance investigation of electronic states in hydrogenated microcrystalline silicon
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1. Radial distribution of C 4 H 8 –H 2 –TMS plasma during plasma‐enhanced chemical vapor deposition of Si‐doped glow discharge polymers;Plasma Processes and Polymers;2019-11-06
2. Structure and electronic properties of biomorphic carbon matrices and SiC ceramics prepared on their basis;Journal of Applied Physics;2018-10-07
3. Hydrogenated Microcrystalline Silicon;Light-Induced Defects in Semiconductors;2014-09-13
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