Role of xenon additive in microwave plasma-assisted (H2+CH4) chemical vapor deposition of diamond thin film
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.368916
Reference13 articles.
1. Diamond synthesis from gas phase in microwave plasma
2. Effects of Oxygen Addition on Diamond Film Growth by Electron-Cyclotron-Resonance Microwave Plasma CVD Apparatus
3. Effects of Oxygen Added to Reagent Gas on Chemical Vapor Deposition of Diamond Thin Films
4. The role of hydrogen in diamond synthesis using a microwave plasma in a CO/H2system
5. Effects of noble gases on diamond deposition from methane‐hydrogen microwave plasmas
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