Multichannel rf-compensated Langmuir probe array driven by a single bias supply
Author:
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1427304
Reference11 articles.
1. RF compensated probes for high-density discharges
2. Measurement of electron energy distribution in low-pressure RF discharges
3. A tuned Langmuir probe for measurements in rf glow discharges
4. Experimental setup and electrical characteristics of an inductively coupled plasma
5. Radio-frequency plasma potential variations originating from capacitive coupling from the coil antenna in inductively coupled plasmas
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2. Two Temperatures Components in CCP Argon 13.56-MHz RF Discharge;IEEE Transactions on Plasma Science;2015-05
3. Langmuir probes for SPIDER (source for the production of ions of deuterium extracted from radio frequency plasma) experiment: Tests in BATMAN (Bavarian test machine for negative ions);Review of Scientific Instruments;2014-11
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