The role of higher silanes in silane-discharge particle growth
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1947895
Reference20 articles.
1. Generation of nano-sized free standing single crystal silicon particles
2. Nanoparticle deposition in hydrogenated amorphous silicon films during rf plasma deposition
3. Observation of Si nanocrystals in a/nc-Si:H films by spherical-aberration corrected transmission electron microscopy
4. Growth and optoelectronic properties of polymorphous silicon thin films
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3. Formation of SiH3Radicals and Nanoparticles in SiH4–H2Plasmas Observed by Time-Resolved Cavity Ringdown Spectroscopy;Japanese Journal of Applied Physics;2008-09-12
4. Time-resolved cavity ringdown spectroscopy on nanoparticle generation in a SiH4–H2 VHF plasma;Journal of Non-Crystalline Solids;2008-05
5. Time-resolved Cavity Ringdown Spectroscopy as a Monitoring Technique of Nanoparticles in Pulsed VHF Plasmas;MRS Proceedings;2007
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