Time-resolved cavity ringdown spectroscopy on nanoparticle generation in a SiH4–H2 VHF plasma
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Condensed Matter Physics,Ceramics and Composites,Electronic, Optical and Magnetic Materials
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1. High-rate microcrystalline silicon deposition for p–i–n junction solar cells
2. Role of Surface and Growth-Zone Reactions in the Formation Process of µc-Si:H
3. The UV absorption spectrum of SiH3
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5. Cavity ring down detection of SiH3 on the broadband à 2A1′ ← X̃ 2A1 transition in a remote Ar–H2–SiH4 plasma
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3. Impact of secondary gas-phase reactions on microcrystalline silicon solar cells deposited at high rate;Applied Physics Letters;2010-06-07
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