Determination of the electron temperature by optical emission spectroscopy in a 13.56 MHz dusty methane plasma: Influence of the power
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.3267292
Reference56 articles.
1. Effects of negative low self-bias on hydrogenated amorphous carbon films deposited by PECVD technique
2. Radical and film growth kinetics in methane radio‐frequency glow discharges
3. Particulates in aluminum sputtering discharges
4. Particle contamination on a silicon substrate in a SF6/Ar plasma
5. Metastability study and optimization of polymorphous silicon solar cells: the state-of-the-art
Cited by 18 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Study of process parameters and characteristics properties of W coatings deposited by rf plasma sputtering;Journal of Vacuum Science & Technology B;2023-04-24
2. In-situ monitoring of plasma-assisted processing of material using optical emission spectroscopy – Role of ionic lines;Materials Today: Proceedings;2023-03
3. Characterization of cyclic dust growth in a low-pressure, radio-frequency driven argon-hexamethyldisiloxane plasma;Journal of Physics D: Applied Physics;2022-07-21
4. Optical emission spectroscopy measurement of plasma parameters in a nanosecond pulsed spark discharge for CO2/CH4 dry reforming;Spectrochimica Acta Part A: Molecular and Biomolecular Spectroscopy;2022-02
5. Plasma chemistry and dust-particle generation in pure methane plasma: Influence of the RF electrode cleanliness;Journal of Applied Physics;2019-08-14
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3