Studies on structural, optical and electrical characteristics of zirconia thin films grown by pulsed laser deposition at different oxygen partial pressures-Reference-Cited by-同舟云学术

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Studies on structural, optical and electrical characteristics of zirconia thin films grown by pulsed laser deposition at different oxygen partial pressures

Published:2021 Issue: Volume: Page:
ISSN:0094-243X
Container-title:ADVANCED MATERIALS AND RADIATION PHYSICS (AMRP-2020): 5th National e-Conference on Advanced Materials and Radiation Physics
language:
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Author:

Padhi P. S.,Ajimsha R. S.,Misra Pankaj

Publisher

AIP Publishing

Link

http://aip.scitation.org/doi/pdf/10.1063/5.0052595

Reference18 articles.

1. Relative stability, structure, and elastic properties of several phases of pure zirconia

2. Effect of O2 gas partial pressure on structures and dielectric characteristics of rf sputtered ZrO2 thin films

3. International Technology Roadmap for Semiconductors, Semiconductors Industry Association, San Jose, 1999.

4. Structure and thermal stability of MOCVD ZrO2 films on Si (100)

5. Room-temperature atomic layer deposition of ZrO2 using tetrakis(ethylmethylamino)zirconium and plasma-excited humidified argon

Cited by 1 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Spray deposited zirconia nanostructures as the chemiresistive probe for methylamine vapour: Is highly selective and sensitive electronic nose, viable?;Materials Science and Engineering: B;2024-07

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