Dry, laser‐assisted rapid HBr etching of GaAs
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.96202
Reference10 articles.
1. Laser‐induced microscopic etching of GaAs and InP
2. Photon‐assisted dry etching of GaAs
3. Improved performance of GaAs microwave field-effect transistors with low inductance via-connections through the substrate
4. Deep‐ultraviolet induced wet etching of GaAs
5. Maskless chemical etching of submicrometer gratings in single‐crystalline GaAs
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