Nitrogen and oxygen transport and reactions during plasma nitridation of zirconium thin films
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.371961
Reference15 articles.
1. Refractory metal nitride rectifying contacts on GaAs
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4. Higher nitrides of hafnium, zirconium, and titanium synthesized by dual ion beam deposition
5. Nitriding of zirconium and aluminium by using ECR nitrogen plasmas
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