A generalized electron energy probability function for inductively coupled plasmas under conditions of nonlocal electron kinetics
Author:
Affiliation:
1. Institute of Nanoscience and Nanotechnology, NCSR Demokritos, Agia Paraskevi 15310, Greece
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.5002653
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