Conduction mechanisms in amorphous and crystalline Ta2O5 thin films
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.367272
Reference14 articles.
1. Preparation and Properties of Ta2 O 5 Films by LPCVD for ULSI Application
2. Electron Transport Mechanisms in Thin Insulating Films
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