Effect of nitrogen–oxygen complex on electrical properties of Czochralski silicon
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.116422
Reference12 articles.
Cited by 80 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Nitrogen-Related Defects in Crystalline Silicon;Applied Sciences;2024-02-18
2. Secondary defects of as-grown oxygen precipitates in nitrogen doped Czochralski single crystal silicon;Materials Science in Semiconductor Processing;2023-08
3. Participation of nitrogen impurities in the growth of grown-in oxide precipitates in nitrogen-doped Czochralski silicon;Journal of Applied Physics;2022-04-21
4. The origin of infrared bands in nitrogen-doped Si;Journal of Materials Science;2022-02-18
5. Theoretical investigation of nitrogen-vacancy defects in silicon;AIP Advances;2022-02-01
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