Electrical and optical properties of indium tin oxide thin films prepared on low‐temperature substrates by rf magnetron sputtering under an applied external magnetic field-Reference-Cited by-同舟云学术

Electrical and optical properties of indium tin oxide thin films prepared on low‐temperature substrates by rf magnetron sputtering under an applied external magnetic field

Published:1988-04-15 Issue:8 Volume:63 Page:2711-2716
ISSN:0021-8979
Container-title:Journal of Applied Physics
language:en
Short-container-title:Journal of Applied Physics

Author:

Nanto H.,Minami T.,Orito S.,Takata S.

Publisher

AIP Publishing

Subject

General Physics and Astronomy

Link

http://aip.scitation.org/doi/pdf/10.1063/1.340964

Reference15 articles.

1. Electroless deposition of In2O3 and In2O3:Sn(ITO)

2. High quality transparent heat reflectors of reactively evaporated indium tin oxide

3. Preparation of Sn‐doped In2O3(ITO) films at low deposition temperatures by ion‐beam sputtering

4. Preparation of conducting and transparent thin films of tin‐doped indium oxide by magnetron sputtering

5. Properties of tin doped indium oxide thin films prepared by magnetron sputtering

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