Author:
Cova P.,Poulin S.,Grenier O.,Masut R. A.
Subject
General Physics and Astronomy
Reference39 articles.
1. Silicon oxynitride planar waveguiding structures for application in optical communication
2. K. Worhoff, P. V. Lambeck, R. M. de Ridder, and A. Driessen, Proceedings 1997 IEEE/LEOS Benelux Chapter, Eindhoven, edited by F. Karouta, J. E. M. Haverkort, F. J. J. Kennis, and A. P. Peeters (STW, Technology Foundation, Utrecht, The Netherlands, 1997), p. 153–156.
3. Silicon nitride and oxynitride deposition by RT-LPCVD
4. Properties of SiOxNy films deposited by LPCVD from SiH4/N2O/NH3 gaseous mixture
5. Effect of unintentionally introduced oxygen on the electron–cyclotron resonance chemical-vapor deposition of SiNX films
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