Moisture Diffusion in PECVD a-SiOxNy:H and a-SiOx:H Coated on Polymer Resins: A Neutron Reflectometry Study-Reference-Cited by-同舟云学术

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Moisture Diffusion in PECVD a-SiO_xN_y:H and a-SiO_x:H Coated on Polymer Resins: A Neutron Reflectometry Study

Published:2024-06-20 Issue:7 Volume:6 Page:4864-4868
ISSN:2637-6113
Container-title:ACS Applied Electronic Materials
language:en
Short-container-title:ACS Appl. Electron. Mater.

Author:

Chevreux Fabien¹,Letiche Manon²,Vorobiev Alexey²³,Wolff Max³^ORCID,Chapelon Laurent-Luc¹

Affiliation:

1. STMicroelectronics, 38920 Crolles, France

2. Institut Laue-Langevin, 38042 Grenoble Cedex 9, France

3. Department of Physics and Astronomy, Uppsala University, 75120 Uppsala, Sweden

Funder

Agence Nationale de la Recherche

Vetenskapsrådet

Publisher

American Chemical Society (ACS)

Link

https://pubs.acs.org/doi/pdf/10.1021/acsaelm.4c00239

Reference15 articles.

1. Application of Polymers to Photoresist Materials

2. Comparing glass and plastic refractive microlenses fabricated with different technologies

3. Scratch Resistance Enhancement of Polymer Coatings

4. Influence of film structure on gas barrier properties of SiOxNy films

5. Gas permeation in silicon-oxide/polymer (SiOx/PET) barrier films: role of the oxide lattice, nano-defects and macro-defects

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