Excimer laser‐induced deposition of silicon nitride thin films
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.338843
Reference7 articles.
1. The Elimination of Devitrification Defects in Antimony Buried‐Layer Diffusions
2. Thermally grown silicon nitride films for high‐performance MNS devices
3. Beam-Assisted CVD of Microelectronic Films
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5. Photo-Chemical Vapor Deposition of Silicon Nitride Film by Direct Photolysis
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