On the effects of implantation temperature in helium implanted silicon
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1525059
Reference8 articles.
1. Cavity formation and impurity gettering in He-implanted Si
2. Gettering of metals by voids in silicon
3. Voids in Silicon by He Implantation: From Basic to Applications
4. Helium desorption/permeation from bubbles in silicon: A novel method of void production
5. Voids in epitaxial silicon films grown under different thermal conditions: void detection by thermal helium desorption
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