X‐ray photoemission spectra of reactively sputtered TiN
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.350465
Reference26 articles.
1. Kinetics of nitride formation on titanium targets during reactive sputtering
2. Structure and properties of TiN coatings
3. Modeling of reactive sputtering of compound materials
4. Predicting thin‐film stoichiometry in reactive sputtering
5. Transmission electron microscopy studies of brown and golden titanium nitride thin films as diffusion barriers in very large scale integrated circuits
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