Study of thermally oxidized yttrium films on silicon
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.98801
Reference10 articles.
1. Some properties of crystallized tantalum pentoxide thin films on silicon
2. Some properties of crystallized tantalum pentoxide thin films on silicon
3. Some properties of crystallized tantalum pentoxide thin films on silicon
4. Electrical Characteristics of the RF Magnetron‐Sputtered Tantalum Pentoxide‐Silicon Interface
5. Electrical Characteristics of the RF Magnetron‐Sputtered Tantalum Pentoxide‐Silicon Interface
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