Oxidation of Cu and Cu3Ge thin films
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.359238
Reference12 articles.
1. Materials Issues in Copper Interconnections
2. Effect of B, C, N, and Ne ion implantation on the oxidation of polycrystalline Cu
3. Oxidation and protection in copper and copper alloy thin films
4. Observation of Reduced Oxidation Rates for Plasmaassisted CVD Copper Films
5. Oxidation resistant high conductivity copper films
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1. Analysis of the Ordered Crystal Structure of Cu3Ge Intermetallic;Metallography, Microstructure, and Analysis;2018-10-16
2. Electrical Conductivity in Electrodeposited Cu-Ge(O) Alloy Films;Journal of The Electrochemical Society;2018
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4. Electrical properties of a Cu-germanide Schottky contact to n-type Ge depending on its microstructural evolution driven by rapid thermal annealing;Thin Solid Films;2017-06
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