SiO2buried layer formation by subcritical dose oxygen ion implantation
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.96892
Reference21 articles.
1. Silicon on Insulator by High Dose Implantation
2. Synthesis of silicon dioxide by ion implantation
3. Silicon on insulator by ion implantation: A dream or a reality?
4. Formation of buried insulating layers by high dose oxygen implantation under controlled temperature conditions
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