Plasma treatment of porous SiNx:H films for the fabrication of porous-dense multilayer optical filters with tailored interfaces
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2202692
Reference32 articles.
1. Solar glass with industrial porous SiO2 antireflection coating: measurements of photovoltaic module properties improvement and modelling of yearly energy yield gain
2. Optical and mechanical properties of sol-gel antireflective films for solar energy applications
3. Porous silicon multilayers for sensing by tuneable IR-transmission filtering
4. Microspectrometer based on a tunable optical filter of porous silicon
Cited by 22 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. In-situ monitoring of stress evolution in high power impulse magnetron sputtering-deposited Ti-Al-N films: Effect of substrate bias and temperature;Thin Solid Films;2023-11
2. Comparison of plasma properties in normal and multiple holes hollow cathode RF PECVD and their utility in a-SiNx:H thin film deposition;Vacuum;2019-02
3. Optical coatings for security and authentication devices;Optical Thin Films and Coatings;2018
4. Argon plasma treatment of silicon nitride (SiN) for improved antireflection coating on c-Si solar cells;Materials Science and Engineering: B;2017-01
5. Electrical evaluation of crack generation in SiN and SiO N thin-film encapsulation layers for OLED displays;Applied Surface Science;2016-05
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3