Nanopatterning of metal-coated silicon surfaces via ion beam irradiation: Real time x-ray studies reveal the effect of silicide bonding-Reference-Cited by-同舟云学术

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Nanopatterning of metal-coated silicon surfaces via ion beam irradiation: Real time x-ray studies reveal the effect of silicide bonding

Published:2013-03-28 Issue:12 Volume:113 Page:124305
ISSN:0021-8979
Container-title:Journal of Applied Physics
language:en
Short-container-title:Journal of Applied Physics

Author:

El-Atwani Osman,Gonderman Sean,DeMasi Alexander,Suslova Anastassiya,Fowler Justin,El-Atwani Mohamad,Ludwig Karl,Paul Allain Jean

Funder

National Science Foundation

Publisher

AIP Publishing

Subject

General Physics and Astronomy

Link

http://aip.scitation.org/doi/pdf/10.1063/1.4797480

Reference51 articles.

1. Formation of Ordered Nanoscale Semiconductor Dots by Ion Sputtering

2. The significance of in situ conditions in the characterization of GaSb nanopatterned surfaces via ion beam sputtering

3. Diffuse-interface model for nanopatterning induced by self-sustained ion-etch masking

4. Producing ripple topographies by ion bombardment with codeposition of impurities: A curvature-dependent sputter yield is not required

5. Highly ordered nanopatterns on Ge and Si surfaces by ion beam sputtering

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1. The ion-gas-neutral interactions with surfaces-2 (IGNIS-2) facility for the study of plasma–material interactions;Review of Scientific Instruments;2024-04-01

2. Plasma nano-patterning for altering hydrophobicity of copper substrate for moist air condensation;Applied Surface Science Advances;2022-10

3. Surface nanopatterning by ion beam irradiation: compositional effects;Journal of Physics: Condensed Matter;2022-06-20

4. Low-Energy Ion Beam Bombardment-Induced Nanostructures;Low-Energy Ion Irradiation of Materials;2022

5. Early stages in the self-organization of Si nanopatterns induced by ion bombardment;Nanotechnology;2020-04-03

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