The effects of dopants on surface‐energy‐driven secondary grain growth in silicon films
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.345756
Reference25 articles.
1. Grain growth and grain size distributions in thin germanium films
2. Grain Growth Mechanism of Heavily Phosphorus‐Implanted Polycrystalline Silicon
3. Surface‐energy‐driven secondary grain growth in ultrathin (<100 nm) films of silicon
4. Compensation of grain growth enhancement in doped silicon films
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