Compensation of grain growth enhancement in doped silicon films
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.96510
Reference13 articles.
1. Surface‐energy‐driven secondary grain growth in ultrathin (<100 nm) films of silicon
2. Secondary grain growth in thin films of semiconductors: Theoretical aspects
3. Silicon-on-insulator by graphoepitaxy and zone-melting recrystallization of patterned films
4. Grain Growth Mechanism of Heavily Phosphorus‐Implanted Polycrystalline Silicon
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