Spatial distribution of the velocity distribution function of Fe atoms in a magnetron sputtering plasma source
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2035311
Reference14 articles.
1. Angular resolved energy distributions of sputtered atoms at low bombarding energy
2. Investigation of time-of-flight and energy distributions of atoms and molecules sputtered from oxygen-covered metal surfaces by laser-aided techniques
3. Thermalization of sputtered atoms
4. Structure and physical properties of sputtered metallic superlattices
5. Monte Carlo simulation of thermalization process of sputtered particles
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