Plasma immersion ion implantation model including multiple charge state
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.361390
Reference18 articles.
1. Plasma source ion‐implantation technique for surface modification of materials
2. Plasma immersion ion implantation for ULSI processing
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4. Plasma immersion ion implantation doping experiments for microelectronics
5. An evaluation of contamination from plasma immersion ion implantation on silicon device characteristics
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