1. Key Laboratory for Thin Film and Microfabrication of Ministry of Education, Department of Micro/Nano Electronics, Shanghai Jiao Tong University, Shanghai 200240, People's Republic of China
2. Department of Electrical Engineering and Institute of Electronics Engineering, National Tsing Hua University, Hsinchu 300, Taiwan
3. Nikolaev Institute of Inorganic Chemistry, 630090 Novosibirsk, Russia
4. Boreskov Institute of Catalysis, 630090 Novosibirsk, Russia
5. Novosibirsk State University, 630090 Novosibirsk, Russia