High performance medium current ion implanter system EXCEED3000AH-G3-Reference-Cited by-同舟云学术

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High performance medium current ion implanter system EXCEED3000AH-G3

Published:2006 Issue: Volume: Page:
ISSN:0094-243X
Container-title:AIP Conference Proceedings
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Author:

Sakai Shigeki,Tanjyo Masayasu,Hamamoto Nariaki,Umisedo Sei,Kobayashi Tomoaki,Yamashita Takatoshi,Matsumoto Takao,Ikejiri Tadashi,Tanaka Kohei,Koga Yuji,Yuasa Satoru,Naito Masao,Nagai Nobuo

Publisher

AIP

Cited by 2 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Beam shape control system by machine learning on the NISSIN BeyEX medium current ion implanter;MRS Advances;2023-01-09

2. Ion beam neutralization using three-dimensional electron confinement by surface modification of magnetic poles;Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment;2011-07

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