Beam shape control system by machine learning on the NISSIN BeyEX medium current ion implanter
Author:
Publisher
Springer Science and Business Media LLC
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science
Link
https://link.springer.com/content/pdf/10.1557/s43580-022-00467-0.pdf
Reference6 articles.
1. Sinclair F et al (2014) VIISta 900 3D: Advanced medium current implanter. In: 2014 20th International Conference on Ion Implantation Technology (IIT)
2. Sakai S et al (2006) International conference of Ion Implantation Technology. Proceedings of the 2006 Int’l Conf of Ion Implantation Tech, pp 605–608
3. Uji N et al (2017) Nissin electric technical review 62(3): 2–6
4. Prediction intervals for gradient boosting regression. https://scikit-learn.org/stable/modules/generated/sklearn.ensemble.GradientBoostingRegressor.html. Accessed 2020
5. J.H. Friedman, Greedy function approximation: a gradient boosting machine. Ann Stat 29, 1189–1232 (2001)
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