Shear mode bulk acoustic wave resonator based on c-axis oriented AlN thin film
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2996319
Reference19 articles.
1. Proceedings of the IEEE Ultrasonics Symposium;Ruby R. C.,2001
2. Proceedings of the IEEE Ultrasonics Symposium;Lakin K. M.,1995
3. First results on label-free detection of DNA and protein molecules using a novel integrated sensor technology based on gravimetric detection principles
4. Microbalance chemical sensor based on thin-film bulk acoustic wave resonators
5. Acoustic transducers
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