Author:
Rubin B.,Topper J. L.,Farnell C. C.,Yalin A. P.
Reference58 articles.
1. Energy and angular distributions of sputtered particles
2. Feature evolution simulations of copper seed layer deposition using atomic-level particle scattering information
3. Proceedings of the 40th Joint Propulsion Conference;Tartz M.,2004
4. Proceedings of the 41st Joint Propulsion Conference;Kolasinski R. D.,2005
5. Proceedings of the 42nd Joint Propulsion Conference;Kolasinski R. D.,2006
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