Local strain distributions in silicon-on-insulator/stressor-film composites
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2975992
Reference15 articles.
1. Effect of mechanical stress induced by etch-stop nitride: impact on deep-submicron transistor performance
2. Crack initiation at free edge of interface between thin films in advanced LSI
3. Submicron mapping of strained silicon-on-insulator features induced
4. Diffraction profiles of elastically bent single crystals with constant strain gradients
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3. X-ray dynamical diffraction from single crystals with arbitrary shape and strain field: A universal approach to modeling;Physical Review B;2014-01-07
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