Crack initiation at free edge of interface between thin films in advanced LSI

Author:

Kitamura Takayuki,Shibutani Tadahiro,Ueno Takashi

Publisher

Elsevier BV

Subject

Mechanical Engineering,Mechanics of Materials,General Materials Science

Cited by 62 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

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