1. Laboratory for MEMS Applications, Department of Microsystems Engineering—IMTEK, University of Freiburg, Georges-Koehler-Allee 103, 79110 Freiburg, Germany
2. cytena GmbH, Georges-Koehler-Allee 103, 79110 Freiburg, Germany
3. Zurich Instruments AG, Technoparkstrasse 1, 8005 Zurich, Switzerland
4. HSG-IMIT, Georges-Koehler-Allee 103, 79110 Freiburg, Germany
5. BIOSS Centre for Biological Signalling Studies, University of Freiburg, 79110 Freiburg, Germany
6. BioFluidiX GmbH, Georges-Koehler-Allee 103, 79110 Freiburg, Germany