Accurate measurement of relative tilt and azimuth angles in electron tomography: A comparison of fiducial marker method with electron diffraction
Author:
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4892436
Reference12 articles.
1. Calibration method of tilt and azimuth angles for alignment of TEM tomographic tilt series
2. Observation of three-dimensional elemental distributions of a Si device using a 360°-tilt FIB and the cold field-emission STEM system
3. High-precision alignment of electron tomography tilt series using markers formed in helium-ion microscope
4. Nano-dot markers for electron tomography formed by electron beam-induced deposition: Nanoparticle agglomerates application
5. Characterization of detector modulation-transfer function with noise, edge, and holographic methods
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