Deep x‐ray lithography for micromechanics and precision engineering (invited)-Reference-Cited by-同舟云学术

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Deep x‐ray lithography for micromechanics and precision engineering (invited)

Published:1996-09 Issue:9 Volume:67 Page:3357-3357
ISSN:0034-6748
Container-title:Review of Scientific Instruments
language:en
Short-container-title:Review of Scientific Instruments

Author:

Guckel Henry

Publisher

AIP Publishing

Subject

Instrumentation

Link

http://aip.scitation.org/doi/pdf/10.1063/1.1147379

Cited by 15 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Challenges in fabrication of high aspect ratio electrostatic comb-drive microactuator using one-step X-ray lithography;ISSS Journal of Micro and Smart Systems;2020-11

2. Microsystems Manufacturing Methods: MEMS Processes;Process Variations in Microsystems Manufacturing;2020

3. Physics of transparent conductors;Advances in Physics;2016-09-28

4. MEMS Lithography and Micromachining Techniques;MEMS Reference Shelf;2011

5. Simultaneous Formation of Two types of Periodic Nanostructure in ZnO Single Crystal by Femtosecond Laser Direct Irradiation;Japanese Journal of Applied Physics;2010-11-22

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