High-resistance buried layers by MeV Fe implantation in n-type InP
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.124476
Reference7 articles.
1. Ion implantation for isolation of III-V semiconductors
2. Channeled substrate buried heterostructure InGaAsP/InP laser employing a buried Fe ion implant for current confinement
3. Diffusion, solubility, and electrical activity of Co and Fe in InP
4. MeV energy Fe and Co implants to obtain buried high resistance layers and to compensate donor implant tails in InP
5. Interaction between Fe, dopants, and secondary defects in MeV Fe ion implanted InP
Cited by 20 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Fe-implantation for rear-facet coatings of InP-based quantum cascade lasers;Electronics Letters;2008
2. Thermally induced Fe atom transition from substitutional to interstitial sites in InP and its influence on material property;Acta Physica Sinica;2007
3. Ion beam analyses and electrical characterization of substitutional Fe properties in Fe implanted InP;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2006-08
4. Mechanisms for the activation of ion-implanted Fe in InP;Journal of Applied Physics;2006-07-15
5. Effects of n-type doping on active Fe sites in ion implanted Fe in InP;Applied Physics Letters;2006-06-19
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线,采集、加工和组织学术论文而形成的新型学术文献查询和分析系统,可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容,当前同舟云学术共收录了国内外主流学术期刊6万余种,收集的期刊论文及会议论文总量共计约1.5亿篇,并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询!咨询电话:010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3