Friction coefficient of diamond under conditions compatible with microelectromechanical systems applications
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4944538
Reference18 articles.
1. Characterisation of tribological behaviour of silicon and ceramic coatings under repeated sliding at micro-scale
2. Wear mechanisms and friction parameters for sliding wear of micron-scale polysilicon sidewalls
3. Ultrananocrystalline diamond thin films for MEMS and moving mechanical assembly devices
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