MEMS/NEMS based on mono-, nano-, and ultrananocrystalline diamond films-Reference-Cited by-同舟云学术

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MEMS/NEMS based on mono-, nano-, and ultrananocrystalline diamond films

Published:2014-06 Issue:6 Volume:39 Page:511-516
ISSN:0883-7694
Container-title:MRS Bulletin
language:en
Short-container-title:MRS Bull.

Author:

Sumant Anirudha V.,Auciello Orlando,Liao Meiyong,Williams Oliver A.

Abstract

Abstract

Publisher

Springer Science and Business Media LLC

Subject

Physical and Theoretical Chemistry,Condensed Matter Physics,General Materials Science

Reference30 articles.

1. Batch production of single-crystal diamond bridges and cantilevers for microelectromechanical systems

2. Observation of Nonlinear Dissipation in Piezoresistive Diamond Nanomechanical Resonators by Heterodyne Down-Mixing

3. Nanoscale magnetic sensing with an individual electronic spin in diamond

4. Superconducting nano-mechanical diamond resonators

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4. Microwave hydrogen plasma etching on the laser-cut surface of single crystal diamond: Phases, etching morphology, stress evolution and the effect of etching on the subsequent homoepitaxial growth;Diamond and Related Materials;2024-03

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