Characteristics of AuSi liquid metal alloy ion source with coupling extractor electrodes-Reference-Cited by-同舟云学术

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Characteristics of AuSi liquid metal alloy ion source with coupling extractor electrodes

Published:1996-10 Issue:10 Volume:67 Page:3501-3506
ISSN:0034-6748
Container-title:Review of Scientific Instruments
language:en
Short-container-title:Review of Scientific Instruments

Author:

Higuchi‐Rusli Ronnie H.

Publisher

AIP Publishing

Subject

Instrumentation

Link

http://aip.scitation.org/doi/pdf/10.1063/1.1147167

Reference20 articles.

1. Ion Beam Assisted Maskless Etching of GaAs by 50 keV Focused Ion Beam

2. Miniature ion sources for analytical instruments

3. Characteristics of Al maskless patterning using focused ion beams

4. Focused ion beam technology and applications

5. (Invited) Fine Focused Ion Beams

Cited by 4 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Electrohydrodynamic emitters of ion beams;Physics-Uspekhi;2020-12-01

2. Liquid metal alloy ion sources—An alternative for focussed ion beam technology;Applied Physics Reviews;2016-06

3. Ultimate nanopatterning of Si substrate using filtered liquid metal alloy ion source-focused ion beam;Thin Solid Films;2013-09

4. A time-of-flight spectrometer for investigations on liquid metal ion sources;Journal of Physics D: Applied Physics;1999-01-01

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