Optical properties of ZrTiO4films grown by radio‐frequency magnetron sputtering
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.359472
Reference24 articles.
1. The transition from αZr to αZrO2 growth in sputter‐deposited films as a function of gas O2 content, rare‐gas type, and cathode voltage
2. Process effects on structural properties of TiO2 thin films by reactive sputtering
3. Optical and crystalline inhomogeneity in evaporated zirconia films
4. dc reactive magnetron sputtering of titanium‐structural and optical characterization of TiO2films
5. Effect of substrate temperature on the properties of ZrO2 films prepared by d.c. reactive magnetron sputtering
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